PE-10, 20, 30
Mass Flow Controller
Communication: Analog (0 ÷ 5 VDC)
Power Supply: 100 / 240 VAC
Power Supply: 100 / 240 VAC
Horiba Instruments
Gas Mass Flow Controller / Meter /
Power Supply / Controller
HORIBA offers a wide variety of products for mass flow control in the form of controllers and meters. All our mass flow control products offer high accuracy and a fast response time. The range of gas flow controllers includes two types of sensors, pressure differential type and thermal type and various communication protocols; analogue, digital, DeviceNet™, PROFIBUS® and EtherCAT®. Choose between the high precision piezo stack valve or the more traditional solenoid valve to control your process gas.
SEC-N100
FLOW RANGE:10SCCM - 1000 SLM
COMMUNICATION: ANALOG & DIGITAL
POWER SUPPLY:± 15V OR ± 24V
GAS TYPE: ALL
S48
FLOW RANGE:10SCCM - 200 SLM
COMMUNICATION: ANALOG
POWER SUPPLY: ± 15V OR ± 24V
GAS TYPE: ALL
S600
FLOW RANGE:10SCCM - 200 SLM
COMMUNICATION: DIGITAL
POWER SUPPLY: ± 24V
GAS TYPE: ALL
SEC-E40
MASS FLOW CONTROLLER
Flow Range:10sccm - 200 slm
Communication: Analog
Power Supply:± 15V
Gas Type: All
MF-C
Mass Flow Controller
Flow Range: 10sccm - 100 slm
Communication: Analog
Power Supply: ± 24V
Gas Type: Non-reactive Gas
Communication: Analog
Power Supply: ± 24V
Gas Type: Non-reactive Gas
MF-F ; SEF
Flow Meter
Flow Range: 10sccm - 100 slm
Communication: Analog
Power Supply: ± 24V
Gas Type: Non-reactive Gas
Communication: Analog
Power Supply: ± 24V
Gas Type: Non-reactive Gas
Software
Multifuctional Software
MFT-20
Quick-Result Checker
SF/VP
High-Accurate Flow Meter
Flow Range: VP-1U: 0.2 - 10 mL/min
VP-2U: 2 - 100 mL/min
VP-3U: 20 - 1000 mL/min
VP-4U: 0.2 - 10 L/min
Gas Type:N2, O2, Air, Ar, CH4, etc
VP-2U: 2 - 100 mL/min
VP-3U: 20 - 1000 mL/min
VP-4U: 0.2 - 10 L/min
Gas Type:N2, O2, Air, Ar, CH4, etc
Power Hub Basic
Communication: Analog & Digital
Power Supply:100 / 240 VAC
Power Supply:100 / 240 VAC
PE-S7; PE-D10/D20
Controller
Communication: Analog
Power Supply: 100 / 240 VAC
Power Supply: 100 / 240 VAC
Horiba Instruments
Liquid Mass Flow Controller / Meter / Vaporizer
HORIBA’s liquid source vaporizers are used throughout the manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizer to meet your requirements.
HORIBA’s Liquid Source Vaporizers can vaporize liquid materials stably and efficiently.
LV-F
Liquid Mass Flow Controller
Flow Range: 0.2 - 30 g/min
Communication: Analog & Digital
Power Supply: ± 15V
Liquid Type: all, except corrosive type
LF-F; XF-100
Liquid Mass Flow Meter
Flow Range: 0.2 - 30 g/min
Communication: Analog & Digital
Power Supply: ± 15V
Liquid Type: all, except corrosive type
LW; VL; LD
Liquid Flow Meter
Flow Range: 0.05 - 60 L/min
Communication: Analog
Power Supply: ± 24V or built-in battery
Liquid Type: all, except corrosive type
MI-1000; MV-1000
Carrier Gas Vaporizer
Flow Range: max 30g/min
Liquid Type: H2O2, H2O, O3, etc
VC-1000
Non-Carrier-Gas Vaporizer
Flow Range: max 30g/min
Liquid Type: H2O2, H2O, O3, etc
VC-1000
Non-Carrier-Gas Vaporizer
Flow Range: max 30g/min
Liquid Type: H2O2, H2O, O3, etc
Horiba Instruments
Pressure Regulator and Valve
UR-Z700
Pressure Regulator
Pressure Range: max 950 kPa
Flow Range: 1, 10, 50 LM
Communication: Analog & Digital
Power Supply: ± 15V
PV-1000; PV-2000
Pressure Valve
Flow Range: 1 - 20 SLM
Communication: Analog
Power Supply: ± 15V
GR-300
Pressure Controller
Pressure Range: 1-100 Torr
Flow Range: 20, 50, 100 SCCM
Communication: Analog & Digital
Power Supply: ± 15V
Gas: He/ Ar/ N2
Horiba Instruments
Process Analyzer & Monitor
EV-140C
Plasma Emission Controller
Wavelength Range: 200 - 800 nm
QL-SG
Residual Gas Analyzer
Measurement Range: 2 - 65 AMU ,2 - 100 AMU, 4 - 300 AMU
Operating Pressure: max 0.9Pa
Communication: Analog
Power Supply: 24 VDC
LEM-CT
Interferometric Monitor
Light Source: Lase diode
Light Source Wavelength: 670nm, 808nm, 905nm, 980nm
Spot Diameter: 20 um to 100 um
IR -300
Vapor Concentration Monitor
Measurement Concentration Range: 0 to 100% of Full Scale
Communication: Analog
Power Supply: Main Unit: 15 VDC
Cell Heater: 200/240VAC
EV 2.0
Spectroscopy Process Monitor
Standard: 200 - 1050 nm
IR -400
Gas Monitor
Communication: Analog & Digital
Horiba Instruments
O3 / H2O2 / O2 Dissolved Monitor
HZ-960
O3 Dissolved Monitor
4 Models: ZH-10: 0.00 - 10.00 mg/L
ZH-40: 0.00 - 40.00 mg/L
ZH-100: 0.00 - 100.00 mg/L
ZH-500: 0.00 - 500.00 mg/L
Operating Temperature: max 80°C
HZ-960-HPO-M
H2O2 Dissolved Monitor
4 Models: ZH-10HPO: 0 - 1000 ppm
ZH-40HPO: 0 - 4000 ppm
ZH-100HPO: 0 - 1.000%
ZH-500HPO: 0 - 5.000%
Operating Temperature: max 80°C
SD-300
O2 Dissolved Monitor
Measurement Range: 0.00 to 20.0 µg/L
0.00 to 200 µg/L
0.00 to 2.0 mg/L
0.00 to 20.0 mg/L
Horiba Instruments
Special Conductivity Meter / Resistivity Meter / pH Meter
HE-960HC, HE-480C-GC, HE-960HC
High Conductivity Meter
Measurement Range: 0 - 1000 mS/cm
Sensor Type: Glass Carbon
HE-960RW-GC, HE-960R-GC
High Resistivity Meter
Measurement Range: 0 - 100 MΩ.cm
Sensor Type: Glass Carbon
UP-100
pH Meter - Auto Calibration
pH Measurement Range: 0 - 14
Temperature: 20 - 60 °C
Repeatability: ± 0.1 pH
Horiba Instruments
Chemical Concentration Monitor
CS-100
CS Monitor
Chemicals Example: HF / HNO3, H2SO4 / HF, HF / EG, SC-1, SC-2, SPM, BHF, FPM, TMAH / H2O2, HNO3 / CH3COOH / H3PO4, etc.
With/Without Cooling unit
CS-600
CS-700
CS Monitor
HE-960H-KOH (KOH)
HE-960H-TM (TMAH)
HE-960CA (Citric Acid)
Chemical Concentration Monitor
Measurement Range: HE-960H-KOH: 0-10%, HE-960H-TM: 0-10% or 0-3%, HE-960CA: 0-2% or 0-2000ppm
HE-960-M (HF, HCL, NH3)
HE-960M-400 (HF)
HE-960H (HF, HCI)
HE-960EM/CM-520L
Chemical Concentration Monitor
Measurement Range: HE-960-M HF: 0-5000ppm, HCL: 0-5000ppm, NH3: 0-5000ppm
Conductivity: 0-50.00/ 0-2.00mS/cm, HF-960H:HF: 0-10.00%, HCl: 0-10.00%
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